Mark your calenders! We are inviting presentations and poster papers for the 2015 International Workshop on EUV Lithography, to be held June 15-19,2015 at the Makena Beach Golf Resort in Maui, Hawaii. This workshop, now in its eighth year, is focused on the fundamental science of EUV Lithography (EUVL). A smaller group setting suitable for networking and brainstorming, with a focus on fundamentals, sets this conference apart from other larger conferences based on the commercial aspects of EUVL. Abstracts are due by March 13, 2015.
Keynote speakers and a detailed list of topics for the workshop will be announced in Janaury 2015.
The 2014 International Workshop for EUV and Soft X-ray Sources was successfully held from November 3-6, 2014. The workshop summary, proceedings, agenda and the abstract book can be downloaded at the links below.