Mark Phillips (Intel Corporation)
Carolyn Larabell (University of California at San Francisco)
Additional keynote speakers will be announced.
In the 2014 Source Workshop, we plan to have special sessions on FEL sources and Water window microscopy.
2014 EUVL Workshop Proceedings
The 2014 EUVL Workshop was successfully held from June 23-27, 2014 at Makena Beach Golf Resort, Maui, Hawaii, USA. The workshop proceedings and workshop summary can be downnloaded at links below.