Final Call For Papers
We would like to announce the (instructions for submission of abstracts) Final Call for Papers for our 17th annual 2024 EUVL Workshop and Supplier Showcase in June at CXRO, LBL, Berkeley, CA. The focus of the upcoming workshop is on the lowering of k1 value, EUVL infrastructure, and address challenges for high-NA EUVL scanners, and evaluating technical options beyond high-NA. We look forward to this year’s workshop and hope to see you there!
Keynote Speakers
Marcelo Ackermann, University of Twente
Steven Carson, Intel
Changyoung Jeong, Samsung
Jan van Schoot, ASML
Stephen Snyder, Micron
Takeo Wantanabe, University of Hyogo
Additional Keynote Speakers to be Announced!
Invited Speakers
Jinho Ahn, Hanyang
Felicie Albert, LLNL
Tom Albrecht, Molecular Vista
Dan Arcaro, Energetiq
Henry Chou, Energetiq
Richard Ciesielski, PTB
Congque Dinh, TEL
Iason Giannopoulos, PSI
Matt Hettermann, EUV Tech
Erik Hosler, Xlight
Martin Kaumanns, Carl Zeiss
Henry Kapteyn, K&M Labs
Myung-Gil Kim, Sungkyunkwan University
Oleg Kostko, CXRO
Dong Gun Lee, E-Sol
Meng Lee, Veeco
Sangsul Lee, Postech
Luke Long, EUV Tech
Zhilong Pan, Tsinghua University
Steve Milton, Tau Systems
Ryan Miyakawa, CXRO
Chang-Yong Nam, Brookhaven National Lab
Dinh Nguyen, Xlight
Alex Robinson, Irresistible Materials
Katrina Rook, Veeco
Stuart Sherwin, EUV Tech
Anuja De Silva, LAM
Prof. Sung, Hanyang University
Jeroen van Tilborg, LBL
Jacqueline van Veldhoven, TNO
Additional Invited Speakers to be Announced!
Workshop Links
Register and Sponsor 2024 EUVL Workshop and Supplier Showcase
2024 Source Workshop: First Call for Papers
We are happy to announce the First Call for Papers for our 2024 Source Workshop which will be held in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Abstracts are due by August 16th. We hope to see you there!
Click Here for First Call for Papers!
We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.
Purchase Proceedings
Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.
PROCEEDINGS NOW PUBLISHED
For a full overview of the workshop, visit the 2023 EUVL Workshop and Supplier Showcase page.
The 2022 Source Workshop was a successful gathering of the EUVL community.
PROCEEDINGS NOW PUBLISHED
For a full overview of the workshop, visit the 2022 Source Workshop page.
Click here to view past EUVL Workshops & Supplier Showcases