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Promoting EUV Lithography via Workshop, Consulting & Education |
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FINAL AGENDA June 10-14, 2013, Maui Hawaii We are happy to announce the final agenda for 2013 EUVL Workshop. The abstract book and agenda can be downloaded at links below. We are still accepting late poster papers until May 30, 2013. 2013 EUVL Workshop Final Agenda Keynote Speakers List of Technical Challenges for 2013 EUVL Workshop The deadline for late poster paper submission is May 30, 2013. Abstracts will be evaluated by the workshop's technical Steering Committee for inclusion in the workshop. Authors will be notified as soon as possible, if their abstracts have been accepted for a poster paper. On-line Workshop Sponsorship meeting.planner@euvlitho.com vivek.bakshi@euvlitho.com ________________________________________________________
2012 International Workshop on EUV and Soft X-ray Sources
October 8-11, 2012, Dublin, Ireland
The 2012 Source Workshop was held Oct. 8-11 in Dublin, Ireland, in the Clinton Auditorium on the campus of University College Dublin. This is the industry's largest annual gathering of EUV and soft X-ray source experts, who took the opportunity to discuss the latest results from their labs. A keynote talk was given by Akira Endo of Waseda University and the HiLASE project. He focused on identifying technology areas that need immediate development to enable current sources of 100 to 250 W. These areas include droplet generation at 150 kHz via electrostatic acceleration; 500 W solid state lasers with picosecond pulses and mJ energy for pre- pulse; and the ability to focus on 10 micron droplets. He also outlined a roadmap for 1000 W source at 13.5 nm and 6.x nm
Continue reading workshop summary at EUVLFocus Blog.
Download 2012 Source Workshop Proceedings (Please open in Firefox brower, if issues with Internet Explorer.) Download 2012 Source Workshop Agenda (Updated) Download 2012 Source Workshop Abstracts (Updated) Download 2011 Source Workshop Summary Download 2011 Source Workshop Proceedings Download 2010 Source Workshop Proceedings | ||||||
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