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Final Agenda Announced!

We are delighted to announce the publication of the Final Agenda and the Abstract Book for the 2024 EUVL Workshop and Supplier Showcase! The focus of the upcoming workshop is on the lowering of k1 value, EUVL infrastructure, addressing the challenges for high-NA EUVL scanners, and evaluating the technical options beyond high-NA. We look forward to this year’s workshop presentations and hope to see you there!

2024 EUVL Workshop and Supplier Showcase Final Agenda

2024 EUVL Workshop and Supplier Showcase Abstract Book

All acceptance letters for papers have been sent out. If you have not heard from us, please write to us at info@euvlitho.com.

Keynote Speakers

Marcelo Ackermann, University of Twente

Steven Carson, Intel

In-Yong Kang, Samsung

Jan van Schoot, ASML

John Shalf, LBL

Steve Snyder, Micron

Takeo Watanabe, University of Hyogo

For List of Invited, Regular and Poster Papers, Please See the Final Agenda

Workshop Links

Final Call for Papers

Abstract Template

Agenda Outline

EUV and Soft Xray Short Course

EUVL Short Course

Lodging Information

2024 Source Workshop: First Call for Papers

We are happy to announce the First Call for Papers for our 2024 Source Workshop which will be held in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Abstracts are due by August 16th. We hope to see you there!

Click Here for First Call for Papers!

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.