2026 EUVL and Source Workshop
Workshop Proceedings Published!
The 2026 EUVL and Source Workshop and Blue-X TWG meeting was successfully held from June 8-11, 2026 at UC Berkeley. Online short courses were held from June 6-7, 2026. The workshop proceedings for 2026 EUVL and Source Workshop are now available at the link below. The workshop attendees will receive complimentary copy of the proceedings. The proceedings for the Blue-X TWG Annual In-Person Meeting, available to members only, have been distributed. Please look out for upcoming meetings of the Blue-X Sub TWGs and visit euvlitho.com/blue-x/ for the latest information.
2025 EUVL and Source Workshop Proceedings Published
The 2025 EUVL and Source Workshop and Blue-X TWG meeting was successfully held from June 23-26,2025 at MIT LL. Online short courses were held from June 21-22, 2025. The workshop proceedings for the 2025 EUVL and Source Workshop are now available at the link below.
